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Effects of gas pressure on 60/13.56 MHz dual-frequency capacitively coupled plasmas

Yuan, Q. H.^*; Yin, G. Q.; Xin, Y.; Ning, Z. Y.

Physics of Plasmas, 2011, 18(5): 053501.

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Nonequilibrium atmospheric pressure plasma jet using a combination of 50 kHz/2 MHz dual-frequency power sources

Zhou, Yong-Jie; Yuan, Qiang-Hua^*; Li, Fei; Wang, Xiao-Min; Yin, Gui-Qin; Dong, Chen-Zhong

Physics of Plasmas, 2013, 20(11): 113502.

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Repairing oxygen plasma-damaged on low dielectric constant MSQ (methylsilsesquioxane) films with anneal

Yin, Guiqin^*; Yuan, Qianghua; Ning, Zhaoyuan

Journal of Electroceramics, 2012, 28(1): 70-73.

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Effect of Oxygen Plasma on Low Dielectric Constant HSQ (Hydrogensilsesquioxane) Films

Yuan Qianghua^*; Yin Guiqin; Ning Zhaoyuan

Plasma Science and Technology, 2013, 15(1): 86-88.

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Optical Spectroscopic Investigation of Ar/CH3OH and Ar/N-2/CH3OH Atmospheric Pressure Plasma Jets

Zhou Yongjie; Yuan Qianghua^*; Wang Xiaomin; Yin Guiqin; Dong Chenzhong

Plasma Science and Technology, 2014, 16(2): 99-103.

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Synthesis of Mixed-Phase TiO2 Nanopowders Using Atmospheric Pressure Plasma Jet Driven by Dual-Frequency Power Sources

Wang, Yong; Yuan, Qianghua; Yin, Guiqin^*; Zhang, Yu; Zhang, Yadong; Li, Yang; Li, Jiaojiao; Wang, Tao; Ma, Shuyi

Plasma Chemistry and Plasma Processing, 2016, 36(6): 1471-1484.

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The Organosilicon thin Film Deposited Using an Atmospheric Pressure Dual-Frequency 50 kHz/33 MHz Frequency Micro-Plasma Jet

Yuan, Q. H.^*; Wang, X. M.; Yin, G. Q.; Li, J.; Dong, C. Z.

Contributions to Plasma Physics, 2016, 56(9): 870-877.

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Synthesis and structure characterization of low dielectric constant MSQ films by using octamethyl cyclotetrasiloxane (D4) as a porosity promotion agent

Yin, Guiqin^*; Yuan, Qianghua; Ning, Zhaoyuan

Vacuum, 2013, 96: 59-62.

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