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摘要
Graphene has important applications as a solid lubricant, but the protective effect of multi-layer graphene coatings on silicon devices in the MEMS under macroscale load remains to be further explored. The tribological properties of a multi-layer carbide-bonded graphene (CBG) coating on silicon substrate with a thickness of 230 nm are investigated under normal temperature and high contact stress, by using a reciprocating linear friction testing machine. The experimental results show that the CBG coating significantly reduce the friction factor and wear degree of the silicon surface. When the loads increase from 1 N (about 551 MPa) to 5 N (about 942 MPa), the friction factor are always stabilized between 0.12 and 0.18. Furthermore, the friction factor remains below 0.2 and the minimum wear rate is about 5.0×10-7 mm3 / (N·m) in 18 000 cycles and under a heavy load of 5 N, which effectively verifies the excellent friction and wear properties of CBG coating at the macroscale. The bulk fragments, peeling pits and continuous scratches on the CBG coating are the basic defects of wear degradation, and the ploughing behavior of wear particles under high contact stress may be the main reasons for the gradual peeling-off of coating. The results show that CBG coating has excellent anti-friction and wear resistance under macroscale load, and reveal the wear process and failure mechanism of the coating. ? 2022 Chinese Mechanical Engineering Society.
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