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摘要
Mini/micro light emitting diode display technology（Mini/Micro LED）is a self-luminous display technology based on micro LED chips. Compared with liquid crystal display technology（LCD）and organic light emitting diode display technology（OLED），it has significant performance advantages and is regarded as the development trend of next-generation display technology. However，due to limitations in mass transfer technology and equipment，Mini/Micro LED display equipment has not yet achieved large-scale mass production. To address this issue，firstly three main process methods are summarized based on the different working principles of existing Mini/Micro LED mass transfer process methods，namely contact micro-transfer technology，non-contact laser transfer technology and self-assembly transfer technology. Secondly，the technology and equipment involved in the existing Mini/Micro LED mass transfer process methods are investigated，and the common key technologies are summarized，namely high-speed and high-precision alignment and visual inspection. Then，in response to the above key technical challenges，the authors conduct systematic and in-depth research on the integrated development of several key technologies and typical equipment in the new Mini/Micro LED display field. Finally，the existing problems and development directions in achieving large-scale mass production of Mini/Micro LED are discussed. ? 2023 Nanjing University of Aeronautics an Astronautics.
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