Optimization of Resonance Type Surface Acoustic Wave Passive Wireless Temperature Sensor [谐振型声表面波无源无线温度传感器件优化]

作者：Cui B.; Wang W.^*; Shan C.; Qu B.

来源：Chinese Journal of Sensors and Actuators, 2021, 34(12): 1563-1570.

DOI：10.3969/j.issn.1004-1699.2021.12.001

• Equivalent circuit
• Finite element method
• Passive wireless temperature measurement
• Resonator
• Surface acoustic wave

In this paper,an optimized design of a one port resonant temperature sensor based on Surface Acoustic Wave(SAW)was developed using the finite element method. Parametric scanning method is used to analyze SAW propagation mode and admission characteristics on the surface of YX quartz crystal,and it is found that the device has the minimum loss when the relative film thickness of the electrode is 1.5%. At the same time,the electrical parameters of the optimized device are extracted by using the equivalent circuit model. On this basis,a resonant SAW temperature sensor with a working frequency of 436.56 MHz is prepared. The test quality factor is up to 9 000,the temperature coefficient of frequency is 9.009 kHz/℃,and the linearity is 5.506 9×10-5%. Combined with the RF reading module,a wireless passive temperature test platform was built. The experimental results showed that the accuracy of temperature measurement in the whole temperature range(-20 ℃~120 ℃)is better than±2 ℃.

• 单位
  中国科学院大学