ZnO nanotubes prepared by atomic layer deposition method [原子层沉积法制备氧化锌纳米管]

作者：Liao R.^*; Liu H.; Ke J.; Li Y.; Liao H.; Luo Z.

来源：Journal of Functional Materials, 2018, 49(10): 10012-10015.

DOI：10.3969/j.issn.1001-9731.2018.10.003

• Atomic layer deposition
• Growth mechanism
• Nanotube
• Polycarbonate film
• Zinc oxide

By using the atomic layer deposition method, zinc oxide nanotubes with uniform size, regular morphology and good crystal quality were successfully prepared. The surface morphology and phase of the samples were analyzed by scanning electron microscope, X-ray diffraction instrument and X-ray photoelectron spectroscopy. The results show that the obtained ZnO nanoparticles are of hexagonal wurtzite structure. The outer diameter of the nanotubes is 2 μm, and the wall thickness is 150 nm. The polycarbonate film with other pore diameter and different atomic layer deposition cycles can be used to control the thickness of the pipe wall to obtain the ZnO nanotubes with different diameters. The method is simple and easy to operate without any intermediate product, so the industrial production can be realized.

• 单位
  华南理工大学