科研之友
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摘要
The micro-driving stage is the key component of high-precision positioning. The traditional work stage has few degrees of freedom（DOFs）and a low resolution；it struggles to adapt to the develop? ment needs of precision measurement and other fields. Thus，this paper presents a 6-DOF high-precision micro-driving stage and its experimental performance. The overall structure is hollow and is based on the series-parallel hybrid drive method. The movement of the six DOFs is distributed reasonably in the transla? tional，rotating，and supporting plates. We also designed and developed a motion-control system for the micro-driving stage and motion-control software that can be used with it. Experimental results indicated that the linear displacement ranges of the X-，Y-，and Z-axis are better than 20，20，and 37 μm，respec? tively，and the angular range is better than 39 ，33 ，27 in the pitch，roll，and yaw directions，respective? ly. The linear displacement resolution is better than 0. 7 nm，and the angular displacement resolution is better than 0. 1 . Compared with the traditional work stage，the proposed 6-DOF micro-driving stage has the advantages of more DOFs and a higher resolution；thus，it is expected to be widely used in ultra-preci? sion machining and lithography equipment. ? 2023 Chinese Academy of Sciences.
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