Simulation and Performance Optimization of MEMS Piezoelectric Directional Microphone [MEMS压电指向性传声器仿真与性能优化]

作者：Zhai Y.; Li J.; Fan Q.; Wang W.

来源：Piezoelectrics & Acoustooptics, 2021, 43(6): 830-833 and 839.

DOI：10.11977/j.issn.1004-2474.2021.06.022

• Characteristic frequency
• Finite element method
• Micro-electro-mechanical system(MEMS) piezoelectric directional microphone
• Piezoelectric structure
• Sensitivity

In order to improve the sound pressure sensitivity of the micro-electro-mechanical system(MEMS) piezoelectric directional microphone, its performance is simulated and optimized by using the finite element method in this paper. The variation of sound pressure sensitivity of the piezoelectric directional microphone structure with the change of the piezoelectric layer material type, thickness and length is studied, the structural parameters are optimized, and the sensitivity and signal-to-noise ratio of the device are improved.The results show that when the thickness of the silicon beam is 10 μm and the thickness of the piezoelectric layer is 6.3 μm, the sensitivity of the device reaches the maximum, which is about 14 dB higher than that of the previous structure.

• 单位
  中国科学院大学