摘要
Based on scanning probe microscope, a set of scattering scanning near-field optical imaging device is designed. The structure of the device and the basic near-field signal detection principle are introduced, andthe influence of the demodulation order, focus spot size and other factors on the near-field optical signal extraction are discussed through models and experiments. In order to verify the performance of the device, a sample of gold nano-particles and a sample of h-BN microcrystals be characterized. The results show that the home-made device achieves a spatial resolution of 10 nm, and the standing wave phenomenon formed by the h-BN phonon polarization excimer can be clearly observed, demonstrating the huge application potential of this technology.
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