Theoretical and Application of a 1-D Model of p+Si/Au Thermopile-Based Gas Flow Sensor [p+Si/Au热电堆式气体流量传感器一维模型及其应用]

作者：Wang S.; Wang J.^*; Li X.

来源：Chinese Journal of Sensors and Actuators, 2020, 33(2): 161-166.

DOI：10.3969/j.issn.1004-1699.2020.02.001

• 1-D model
• P+Si/Au thermopile
• Single-side silicon bulk-micromachining
• Thermopile-based gas flow sensor

In order to analyze the response of the thermopile-based gas flow sensor when key design parameters change,a 1-D model of thermopile-based sensor is employed and validated by the FEA(finite-element-analysis)model. With this 1-D model,the key parameters of the sensor can be simulated to optimized the sensitivity. Based on these analyses,a new p+Si/Au thermopile-based flow sensor is designed and fabricated to verify the 1-D model. The sensor shows a normalized sensitivity of 481 [mV/(m/s)]/W which is much bigger than that of previously reported works. Tested results of the sensor have a good agreement with that of the 1-D model,which prove the credibility of the 1-D model.

• 单位
  中国科学院大学