科研之友
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摘要
In order to meet the needs of high-precision plane motion, a basin-shaped plane ultrasonic motor is proposed in this paper. The anti-symmetric longitudinal stretching vibration, the first-order bending vibration in the plane of the left and right square bars, and the first-order bending vibration modes of the front and rear square bars are selected as the operating modes, and the longitudinal vibration mode and bending vibration mode composite to form the elliptical motion of xOz and yOz surfaces.The driving principle of the motor is presented in this paper. Based on ANSYS analysis software, the finite element model of stator is established, the structure size is optimized, the interference mode separation is realized, the harmonic response and transient analysis are carried out, and the motion regulation characteristics are analyzed. Based on the optimization of frequency consistency, the overall size of the basin-shaped stator is 53.136 mm×4.550 mm×4.560 mm, and the x, y and z-directional amplitudes on the stator driving foot are 2.0 μm, 1.49 μm, and 3.36 μm respectively. The elliptical motion trajectory is simulated, and the good motion characteristics of the planar motor are verified. The stator fixing method is given and the motor assembly structure is designed.
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