科研之友
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摘要
As Extreme Ultraviolet (EUV) lithography has become the most advanced lithography technology applied in the semiconductor manufacturing industry, corresponding EUV photoresists have also developed significantly in recent years. Herein, the development of polymeric, single-molecule-resin, and organic-inorganic hybrid EUV photoresists has been reviewed, considering the new problems and challenges faced by EUV lithography. It should benefit the researchers in the EUV lithography and photoresist.
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