科研之友
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摘要
A high power plasma supply with high reliability and high performance plays an important role in the development and application of high power plasma system.This paper designs a kind of high energy efficient, stable and reliable 50 kW plasma inverter, which uses full-bridge inverter technology with high frequency to realize the efficient energy transfer and transformation for strong plasma.This design respectively takes UC3846 and high frequency pulse transformer as the cores of the control circuit and driver circuit,and adopts double-loop control mode to further improve the response performance and reliability of the power system.Finally,the experimental studv of the performance testing and arcing has been done in the developed prototype.The results show that this design is rational and feasible,and the developed high power plasma inverter works reliably with excellent performance.
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