Epitaxy of Ⅲ-nitrides on two-dimensional materials and its applications

作者：徐俞; 王建峰^*; 曹冰; 徐科^*

来源：Chinese Physics B, 2022, 31(11): 36-48.

Ⅲ-nitride semiconductor materials have excellent optoelectronic properties, mechanical properties, and chemical stability, which have important applications in the field of optoelectronics and microelectronics. Two-dimensional(2D)materials have been widely focused in recent years due to their peculiar properties. With the property of weak bonding between layers of 2D materials, the growth of Ⅲ-nitrides on 2D materials has been proposed to solve the mismatch problem caused by heterogeneous epitaxy and to develop substrate stripping techniques to obtain high-quality, low-cost nitride materials for high-quality nitride devices and their extension in the field of flexible devices. In this progress report, the main methods for the preparation of 2D materials, and the recent progress and applications of different techniques for the growth of Ⅲ-nitrides based on 2D materials are reviewed.

• 单位
  中国科学院